| 摘要 |
<p>An information processing apparatus, an information processing method, and a memory medium are provided to improve productivity by feeding back detecting results of an abnormal change to a manufacturing process and a design pattern. An information processing apparatus includes an information collecting part, a converting part, a statistical processing part, and an analyzing part. The information collecting part collects first device information obtained through an exposure device(100) about a plurality of first regions which forms a first array defined on a substrate. The converting part converts at least one part of the first device information collected about each first region into second device information about a plurality of second regions which forms a second array. The statistical processing part processes the second device information. The analyzing part analyzes a result obtained by the statistical processing part.</p> |
