发明名称
摘要 A method for forming a pattern includes filling a resist in a groove of a cliché corresponding to the position of the pattern to be formed, transferring the resist which is filled in the groove onto a printing roll by rotating the printing roll in a direction parallel to the longest portion lengthwise direction of a pattern formed in cliché, and applying the resist on an etching object layer by rotating the printing roll along the etching object layer on a substrate.
申请公布号 KR100909422(B1) 申请公布日期 2009.07.24
申请号 KR20020088447 申请日期 2002.12.31
申请人 发明人
分类号 G02F1/13;B05D1/28;B41M1/10;G03F7/00;G03F7/16;H01L21/027;H01L21/3205;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;H01L51/40 主分类号 G02F1/13
代理机构 代理人
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