| 摘要 |
An interlock device for semiconductor manufacturing equipment is provided to improve largely the stability of the semiconductor manufacturing equipment by operating an interlock circuit and performing an interlock function in a hardware manner. An interlock device(200) for semiconductor manufacturing equipment includes a first relay unit(210), a first timer unit(120), a second timer unit(140), an alarm unit(130), and a power blocking unit(150). The first relay unit is operated in response to a danger sensing signal. The first timer unit is driven in a relay manner by using the first relay unit. The second timer unit and the alarm unit are driven in the relay manner after a first time by using the first timer unit. The power blocking unit is driven in the relay manner after a second time by using the second timer unit.
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