SINGLE CRYSTAL INGOT HAVING CONTROLLED SHOULDER SHAPE AND MANUFACTURING METHOD THEREOF

摘要

A single crystal ingot having a controlled shoulder shape and a manufacturing method thereof are provided to reduce a lowering effect of productivity according to lifting failure thereof by reducing remarkably a lifting failure rate of a shoulder part. A single crystal ingot is manufactured by a Czochralski method. The single crystal ingot includes a shoulder part, a body part, and a tail part. The shoulder part includes an upper shoulder part and a lower shoulder part. A diameter of the upper shoulder part is increased gradually. The upper shoulder has a contour line of a concave shape. A diameter of the lower shoulder part is linearly increased in a constant ratio. The lower shoulder has a contour line of a convex shape. The contour line of the convex shape is connected with a contour line of a linear shape.