| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stopping method of a gas production apparatus by which the production of gas is stopped when a stopping signal is inputted, and impurities incorporated in the produced gas at the next starting up are suitably be reduced. <P>SOLUTION: The stopping method of the gas production apparatus provided with two or more adsorbing columns and producing gas by a PSA (Pressure Swing Adsorption)mechanism, comprises a first pressure equalization step of supplying residual gas in at least one adsorbing column to the other adsorbing columns after the stopping signals are inputted, and roughly equalizing the pressure among the adsorbing columns; and a first depressurizing step of depressurizing the adsorbing column supplied with the residual gas in the first pressure equalization step. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
