| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus that can remove dust from a second face of a workpiece after inverted, without increasing the total length of the apparatus along a conveying direction of the workpiece. <P>SOLUTION: An inverting device 9 includes: a suction base having a housing concave portion; a supporting member freely rotatably supporting the suction base around a horizontally set rotation axis, from an initial state to over 180 degrees; a rotation driving motor rotating the suction base with respect to the supporting member; an open/close base opening and closing the housing concave portion; and a rotation motor rotating the open/close base. A cleaning unit is held so as to be movable by a Y-Z table. An inverting section controller rotates the suction base from such a state that the suction base is in the initial state as well as the open/close base is in a closed state, stops the suction base at a position where the housing concave portion exceeds a horizontal direction and is tilted, opens the open/close base, allows the cleaning unit to remove dust from the surface of a workpiece W, and subsequently, turns the suction base into a horizontal direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
