| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of preventing breakage of an oscillating arm even when an excessive impact is given. <P>SOLUTION: An angular velocity sensor element 2 according to the present embodiment has oscillating arms 22, 23, and 24 made of semiconductor material and a stopper member provided so as to restrict the range of oscillation of each oscillating arm. As such a stopper member, for example, a first stopper member 25 is provided which restricts the range of oscillation of each oscillating arm in at least one plane. Fixing portions 21, the oscillating arms 22, 23, and 24, and the first stopper member 25 are integrally formed by processing a semiconductor material such as silicon. <P>COPYRIGHT: (C)2009,JPO&INPIT |
