| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic EL device and a method for inspecting it, in which positional displacement between a photomask and a substrate can be easily inspected without any damage to an organic film. SOLUTION: A method for manufacturing the organic EL device 11 includes the steps of: arranging a photomask on a substrate; depositing an R emission layer material 42a on inspection areas 52 located on a pixel area 51 and on an area outside of the pixel area 51; in a first inspection portion 53 of the inspection areas 52, depositing the R emission layer material 42a at a position corresponding to a positional relationship between the photomask and the substrate; and inspecting the positional displacement of the R emission layer material 42a, more specifically, exiting a depositing pattern by irradiating ultraviolet rays to the first inspection portion 53, and observing photoluminescence light by using a fluorescent microscope so as to inspect the positional displacement of the R emission layer material 42a. COPYRIGHT: (C)2009,JPO&INPIT
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