| 摘要 |
PROBLEM TO BE SOLVED: To provide a flaw inspection device of film for detecting the microflaw on the surface of the film that will not produce difference in the transmittance of light, between the normal location and flaw of the film. SOLUTION: The flaw inspection device 10 includes a first system 14 for detecting the protruded flaw 20a of the film 12 and a second system 16 for detecting the recessed flaw 20b of the film 12. Furthermore, the values detected by the first and second systems 14 and 16 are subjected to arithmetic processings by a computer 18, and determination of the flaws is conducted The film 12 to be inspected is a high functional film, such as, phase difference film transmitting light. COPYRIGHT: (C)2009,JPO&INPIT
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