METHOD FOR MANUFACTURING NOZZLE SUBSTRATE, NOZZLE SUBSTRATE, LIQUID DROPLET DISCHARGE HEAD, METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGE HEAD, AND LIQUID DROPLET DISCHARGE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle substrate or the like which enables accuracy improvements of a plate thickness and a nozzle length by forming the nozzle substrate by film formation instead of forming by plate-thinning working such as grinding. SOLUTION: The method for manufacturing the nozzle substrate includes a process for film-forming a sacrificial layer 101 on a film formation substrate 100, a nozzle substrate base material forming process for film-forming a doped polysilicone layer 102 with phosphor doped therein as a nozzle substrate base material on the sacrificial layer 101, a nozzle hole forming process for forming nozzle holes in the doped polysilicone layer 102 by dry etching, and a stripping process for stripping the doped polysilicone layer 102 from the film formation substrate 100 by removing the sacrificial layer 101 by etching. COPYRIGHT: (C)2009,JPO&INPIT