| 摘要 |
PROBLEM TO BE SOLVED: To provide an intensity distribution measuring method for energy beam by which an intensity distribution of an energy beam in a beam section can be measured with high accuracy. SOLUTION: (a) A sample for evaluation is prepared which has, on a surface, an evaluation film undergoing a change in property when the energy density of an incident energy beam exceeds a threshold. (b) The energy beam emitted from a beam source is made incident on the evaluation film while made different in attenuation amount and made different in incident position each time the attenuation amount is made different to thereby form a plurality of beam irradiation marks. (c) The intensity distribution of the energy beam in the beam section is found based upon a distribution of whether the evaluation film changes in property in the plurality of beam irradiation marks. COPYRIGHT: (C)2009,JPO&INPIT
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