| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of and a device for cleaning a surface which are excellent in cleaning efficiency and effects while suppressing an installation cost without any trouble in waste liquid disposal. SOLUTION: The method for cleaning the surface by in-water burning submerges the surface of a material to be cleaned with water or immerses it in water with the material to be cleaned held, the surface of the material is irradiated with burning flame while removing water on the surface, and the contaminants on the surface of the material are eliminated by exposing the surface of the material to the burning flame and an active species generated by the burning flame. Further, the burning flame is preferably is emitted to the side of the material through a flame stabilizer and is controlled so that the material is at a predetermined temperature. COPYRIGHT: (C)2009,JPO&INPIT
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