发明名称 |
Laser Chalcogenide Phase Change Device |
摘要 |
A laser activated phase change device for use in an integrated circuit comprises a chalcogenide fuse configured to connect a first patterned metal line and a second patterned metal line and positioned between an inter layer dielectric and an over fuse dielectric. The fuse interconnects active semiconductor elements manufactured on a substrate. A method for activating the laser activated phase change device includes selecting a laser condition of a laser based on characteristics of the fuse and programming a phase-change of the fuse with the laser by direct photon absorption until a threshold transition temperature is met.
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申请公布号 |
US2009179201(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
US20080972660 |
申请日期 |
2008.01.11 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
HOOPER ANDY E.;KAWASAKI ALLEN;HAINSEY ROBERT |
分类号 |
H01L29/04;H01L21/263 |
主分类号 |
H01L29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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