| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of speedily inspecting a prescribed inspection area of inspection objects. <P>SOLUTION: The X-ray inspection device 100 comprises a scanning type X-ray source 10 outputting X-rays; an X-ray detector drive section 22 attached with a plurality of X-ray detectors 23 and capable of driving independently the plurality of X-ray detectors 23; and an image acquisition control mechanism 30 controlling the acquisition of image data from the X-ray detector drive section 22 and the X-ray detectors 23. The scanning type X-ray source 10 moves the X-ray focal position to each X-ray emission origin point set for X-rays to transmit the prescribed inspection area of the inspection object 20 and to enter each X-ray detector 23 and emits X-rays with respect to each of the X-ray detectors 23. A part of the X-ray detectors 23 image and the others moves to their imaging positions parallelly and alternately. The image acquisition control mechanism 30 acquires image data detected by the X-ray detectors 23, and a computing section 70 reconstructs the images of the inspection area based on the image data. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
