METHOD AND APPARATUS FOR CREATING IMAGE

摘要

PROBLEM TO BE SOLVED: To create connected images that are fast and accurate even with a monotonous pattern by using design data as constraint conditions, roughly determining a reference position through the matching of the design data with image data, and matching adjacent images while setting the amount of difference from the design data as a search range. SOLUTION: A method for creating images is for inspecting an electronic device pattern using a scanning electron microscope and comprises a design data file where design data describing the layout information of the electronic device pattern is input and stored; a plurality of split image data obtained by capturing images of the electronic device pattern at different image capturing positions; and an image connection means for connecting the plurality of split image data into one image while using the plurality of split image data and the design data of the design data file. COPYRIGHT: (C)2009,JPO&INPIT