| 摘要 |
PROBLEM TO BE SOLVED: To provide an adsorption-conveying apparatus preventing a cleaning liquid for cleaning the rear face of a semiconductor apparatus from being sucked into the surface of the semiconductor apparatus. SOLUTION: The adsorption-conveying apparatus is an adsorption-conveying apparatus adsorbing a plurality of semiconductor apparatuses 20 in a lump sum and conveying them. It comprises: a vacuum chamber 8 for aspirating air; an aspirating path 19 communicated by the vacuum chamber 8; an adsorbing pad ring 1 for adsorbing a first main face of the semiconductor apparatus 20 by aspirating air in the aspirating path 19 with the vacuum chamber 8; a cleaning means 25 for injecting a cleaning liquid toward a second main face opposite to first main face of the semiconductor apparatus 20; an air chamber 12 for releasing air; and an air path 14 communicated with the air chamber 12 and provided around the adsorbing pad ring 1 for releasing air released from the air chamber 12 in the direction from the first main face toward second main face of the semiconductor apparatus 20. COPYRIGHT: (C)2009,JPO&INPIT
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