LASER BEAM MACHINING METHOD AND LASER BEAM MACHINING APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform consistent machining of a surface of an object to be machined in which a plurality of members of different transmittances are layered.

SOLUTION: A laser beam machining method for machining a workpiece has a plurality of areas of different transmittances in its thickness direction to a desired machining pattern for the area having low transmittance by performing scanning with laser beam from one face thereof by using a laser beam scanning apparatus provided with a laser beam scanning part for performing scanning with the laser beam at least in a two-dimensional plane in the face of the workpiece. The method includes: a step of setting the condition of the machining position for the laser beam machining apparatus; a step of positioning the workpiece so that the side of the area having high transmittance of the workpiece is opposed to the laser beam emission side of the laser beam machining apparatus; and a step of machining the area of high transmittance by performing scanning with the laser beam by the laser beam scanning part from the side of the area having the higher transmittance of the workpiece according to the set condition of the machining position.

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