摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a discharge head provided with less fluctuating and stable discharge characteristics. SOLUTION: In one embodiment, the method for manufacturing a discharge head is provided with a flow passage forming step of forming a flow passage for a liquid with a lithography method. In an exposure step, a mother substrate 103 is exposed in block by the use of a mask 200 having a plurality of flow passage exposure patterns C1 to C22 which are subjected to dimension correction corresponding to distances L from an exposure center E<SB>0</SB>with respect to reference distances for designing a plurality of flow passages. COPYRIGHT: (C)2009,JPO&INPIT
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