发明名称 |
DETERMINING ANGLE OF INCIDENCE WITH RESPECT TO WORKPIECE |
摘要 |
A method, system and computer program product for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage are disclosed. A method for determining an angle of incidence of a light beam illuminating a workpiece positioned on a stage may include: positioning a calibration target on the stage with multiple different tilts; first determining an angle of incident of the light beam with respect to the calibration target with each tilt using a detector; mapping a response of the detector to a determined angle of incidence; and second determining the angle of incidence with respect to the workpiece based on a result of the mapping.
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申请公布号 |
US2009180108(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
US20080014408 |
申请日期 |
2008.01.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOTTINI CLEMENTE;FIEGE RONALD D.;YOUNG ROGER M.;ZANGOOIE SHAHIN;ZHOU LIN |
分类号 |
G01C1/00 |
主分类号 |
G01C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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