SELF-COMPENSATING APPARATUS OF INTERFERENCE-FRINGE-GENERATING POSITION TO COMPENSATE OPTICAL PATH DIFFERENCE RESULT FROM OBJECTIVES LENS WORKING DISTANCE VARIATION FOR ENVIRONMENT TEMPERATURE VARIATION IN REGARD OF INTERFERENCE LENS

摘要

The present invention relates to an apparatus for self-compensating a position of an interference fringe generating part to compensate a optical path difference, and includes an objective lens which forms an image of the surface of the object; an adapter which receives a barrel of the objective lens and fastened to the outside surface of the objective lens; an interference fringe generating part which is placed at the opposite side to the objective lens and generates an interference fringe pattern the image of the surface of the object; and an interference fringe generating position adjusting part which receives the adapter and varies a position of the interference fringe generating part in response to the length variation of the barrel of the objective lens.