发明名称 |
INGOT CUTTING APPARATUS AND CUTTING METHOD |
摘要 |
<p>Disclosed is an ingot cutting apparatus characterized by comprising at least an ingot supporting pad for supporting the cut ending portion of an ingot from below at the position of a clearance of a cutting table for cutting the ingot with a blade, and a pad lifting mechanism for bringing up the ingot supporting pad from below into close contact with the ingot. Without being influenced by the step of the clearance portion of the cutting table, therefore, the ingot cutting apparatus prevents the cut-ending portion of the ingot from being cracked, so that the apparatus can improve the production yield while eliminating the maintenance for adjusting the cutting table. Also disclosed is a cutting method using the ingot cutting apparatus.</p> |
申请公布号 |
WO2009087723(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
WO2008JP03828 |
申请日期 |
2008.12.18 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD.;NISHINO, HIDEHIKO;TSUNODA, SHIGEHARU |
发明人 |
NISHINO, HIDEHIKO;TSUNODA, SHIGEHARU |
分类号 |
B28D7/04;B24B27/06;B28D5/04;C30B35/00;H01L21/304 |
主分类号 |
B28D7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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