PROCESS FOR PRODUCING PLASMA DISPLAY PANEL AND PROCESS FOR PRODUCING SUBSTRATE STRUCTURE FOR PLASMA DISPLAY PANEL

摘要

This invention provides a process for producing a substrate structure for PDP, which can reduce the amount of a foam residue which stays in a dielectric layer after baking. The production process is characterized in that it comprises the step of forming a transparent electrode formed of ITO on a substrate, forming a glass layer so as to cover the transparent electrode, and baking the glass layer to form a dielectric layer, the glass in the glass layer is a glass frit substantially free from lead, the step of forming the transparent electrode comprises the step of forming an ITO film by sputtering under a mixed gas atmosphere containing a rare gas and an oxygen gas, and the flow rate ratio of the oxygen gas to the total flow rate of the mixed gas is 1.0 to 2.5%.