发明名称 |
ROOM TEMPERATURE BONDING MACHINE AND ROOM TEMPERATURE BONDING METHOD |
摘要 |
Provided is a cold jointing apparatus, which comprises a discharge device, a gas feeding device, a pressure gauge, a clarifying device, a pressure controller and a pressing mechanism. The discharge device discharges a gas from the inside of a chamber. The gas feeding device feeds an introduction gas to the inside of the chamber. The pressure gauge measures the pressure in the chamber. The clarifying device clarifies a first board and a second board in the chamber when the measured pressure is at a predetermined degree of vacuum. The pressure controller controls both the discharge device and the gas feeding device so that the measured pressure may be equal to a target pressure. The pressing mechanism presses the first board and the second board in the chamber when the measured pressure is that target pressure. |
申请公布号 |
CA2711227(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
CA20082711227 |
申请日期 |
2008.09.29 |
申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD. |
发明人 |
KINOUCHI, MASATO;GOTO, TAKAYUKI;TAWARA, SATOSHI;TSUNO, TAKESHI;UTSUMI, JUN;IDE, KENSUKE;SUZUKI, TAKENORI |
分类号 |
B23K20/00;B81C3/00;H01L21/02 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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