| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to diagnose a damage state with high reliability. <P>SOLUTION: An apparatus 20 for diagnosing machine includes an estimation part 21 of a driving force of a driven object for estimating the driving force of the driven object based on a torque command value to a servo motor 3 obtained from a position command value; an estimation part 23 of elastic deformation error for estimating elastic deformation error of a ball screw 4 from the driving force of the driven object; a positional deviation arithmetic operator 22 for operating positional deviation from a rotation position of the servo motor 3 and a position of a table 2; and a machine damage diagnosis part 24 for diagnosing a damage state of the driven object by operating a machine damage coefficient by using the elastic deformation error and the positional deviation and by comparing the obtained machine damage coefficient with a previously set threshold value. <P>COPYRIGHT: (C)2009,JPO&INPIT |
