THIN FILM TRANSISTOR, CIRCUIT APPARATUS AND LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To reduce variation in electric characteristics of the thin film transistor in: a thin film transistor; a circuit apparatus including the thin film transistor; a liquid crystal display including the thin film transistor; and a liquid crystal display including the circuit apparatus. SOLUTION: A thin film semiconductor device includes a glass substrate 51, an amorphous silicon film 53 provided on the substrate, a plurality of thin and long crystal grains 31 crystallized on the amorphous silicon film, and a thin film transistor having an active layer 11 arranged on the crystal grains. COPYRIGHT: (C)2009,JPO&INPIT