| 摘要 |
PROBLEM TO BE SOLVED: To prevent the dropping of an undesired SOG from a nozzle, and prevent the application of crystallized or solidified particles, in an SOG coating apparatus whereon different kinds of SOG materials are mounted. SOLUTION: An SOG feeding method includes a step for discharging a second spin-on-glass from a second nozzle by a predetermined quantity at the time of start or end for a lot, when performing the processing for feeding a first spin-on-glass from a first nozzle to the lot. Further, the SOG feeding method includes a step for cleaning the second nozzle when starting the processing of a substrate included in the lot. COPYRIGHT: (C)2009,JPO&INPIT
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