发明名称 |
BROADBAND ANTIREFLECTIVE OPTICAL COMPONENTS WITH CURVED SURFACES AND THEIR PRODUCTION |
摘要 |
Methods and optical devices are proposed, which comprise a nanostructure (4) on a curved surface so that a broadband antireflective characteristic is obtained. The nanostructure is fabricated by means of a self-masking single step etch process of silicon (3) on the curved surface
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申请公布号 |
US2009180188(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
US20070294129 |
申请日期 |
2007.03.23 |
申请人 |
X-FAB SEMICONDUCTOR FOUNDRIES AG |
发明人 |
BACH KONRAD;GAEBLER DANIEL |
分类号 |
G02B1/11;G02B5/30 |
主分类号 |
G02B1/11 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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