发明名称 BROADBAND ANTIREFLECTIVE OPTICAL COMPONENTS WITH CURVED SURFACES AND THEIR PRODUCTION
摘要 Methods and optical devices are proposed, which comprise a nanostructure (4) on a curved surface so that a broadband antireflective characteristic is obtained. The nanostructure is fabricated by means of a self-masking single step etch process of silicon (3) on the curved surface
申请公布号 US2009180188(A1) 申请公布日期 2009.07.16
申请号 US20070294129 申请日期 2007.03.23
申请人 X-FAB SEMICONDUCTOR FOUNDRIES AG 发明人 BACH KONRAD;GAEBLER DANIEL
分类号 G02B1/11;G02B5/30 主分类号 G02B1/11
代理机构 代理人
主权项
地址