| 摘要 |
PROBLEM TO BE SOLVED: To reduce the outer dimension of the cross section of an electron beam lens barrel, to which a pump for evacuating the inside is attached, after the pump has been attached. SOLUTION: Anodes 311 to 322 of a sputter ion pump P1 for exhausting the inside of an electron beam lens barrel 1 in the electron beam apparatus has a plurality of holes, and the plurality of holes are annularly arranged on the circumference of a vacuum chamber 12 in the electron beam lens barrel 1. COPYRIGHT: (C)2009,JPO&INPIT
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