| 发明名称 |
Methods of depositing nanomaterial & methods of making a device |
| 摘要 |
Methods for depositing material and nanomaterial onto a substrate are disclosed. Also disclosed are methods of making devices including nanomaterials, and a system useful for depositing materials and nanomaterials.
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| 申请公布号 |
US2009181478(A1) |
申请公布日期 |
2009.07.16 |
| 申请号 |
US20080287145 |
申请日期 |
2008.10.06 |
| 申请人 |
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发明人 |
COX MARSHALL;KIM LEEANN;BREEN CRAIG;ANC MARIA J.;COE-SULLIVAN SETH;KAZLAS PETER T. |
| 分类号 |
H01L33/00;H01L21/02 |
主分类号 |
H01L33/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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