| 发明名称 |
INTEGRATED CIRCUIT SYSTEM EMPLOYING FEED-FORWARD CONTROL |
| 摘要 |
An integrated circuit system that includes: providing a substrate and a material layer; measuring a parameter of the material layer; and correlating the thickness of an anti-reflective layer to the measured parameter of the material layer for critical dimension control.
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| 申请公布号 |
US2009179307(A1) |
申请公布日期 |
2009.07.16 |
| 申请号 |
US20080014448 |
申请日期 |
2008.01.15 |
| 申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
ZHOU WENZHAN;GOH JASPER;KOH HUI PENG;HSIEH JUNG YU;ZHOU MEISHENG |
| 分类号 |
H01L23/58;H01L21/66 |
主分类号 |
H01L23/58 |
| 代理机构 |
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