| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability of humidity resistance of a piezoelectric component, simplify a manufacturing method thereof, and reduce manufacturing cost thereof. <P>SOLUTION: The piezoelectric component is composed of: a piezoelectric element which has a piezoelectric substrate 2, a comb-tooth electrode 3 formed on a main surface of the piezoelectric substrate 2, wiring electrodes 9 with element wiring arranged adjacent to the comb-tooth electrode 3, and a seal electrode 4 with an aperture unit 4a surrounding an outer periphery of the wiring electrodes 9 and formed on the main surface of the piezoelectric substrate 2; a metal foil layer 5 which is laminated on an upper surface of the seal electrode 4, and has an aperture unit 5a whose size is the same to the aperture unit 4a; a metal cover body 6 which covers an upper surface of the metal foil layer 5, is fixed so that there is a space S between the comb-tooth electrode 3 and the piezoelectric substrate; and through electrodes 8 which are prepared through front and rear surfaces of the piezoelectric substrate 2, and electrically connect the wiring electrodes 9 and terminal electrodes 7 prepared on a rear surface of the piezoelectric substrate 2. The manufacturing method of the piezoelectric component is also provided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
