发明名称 |
FLOW RATE CONTROL DEVICE |
摘要 |
A flow rate control device includes: a fuel gas supply channel (11) having a flow rate adjusting valve (2); a thermal type mass flow rate sensor (3) arranged in the supply channel (11); a calculation unit (6) which calculates a thermal quantity flow rate (Fc) of the fuel gas defined by a product of a volume flow rate (Fv) of the fuel gas and a heat generation quantity (Qv) per unit volume of the fuel gas according to an output from the thermal type sensor (3); and a flow rate control unit (5) which controls the open degree of the flow rate adjusting valve (2) according to a difference between a control target value (Fo) for controlling the thermal quantity flow rate (Fc) and the thermal quantity flow rate (Fc) calculated by the calculation unit (6). |
申请公布号 |
WO2009088017(A1) |
申请公布日期 |
2009.07.16 |
申请号 |
WO2009JP50080 |
申请日期 |
2009.01.07 |
申请人 |
YAMATAKE CORPORATION;ISETANI, JUNICHI |
发明人 |
ISETANI, JUNICHI |
分类号 |
F23N1/00;G01F1/00;G01F1/68 |
主分类号 |
F23N1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|