发明名称 |
ELECTRICAL FUSE AND METHOD OF MAKING THE SAME |
摘要 |
<p>A semiconductor fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a trench feature in a substrate, depositing fuse material in the trench feature and compressive stress liner material over the fuse material, and patterning the compressive stress liner material.</p> |
申请公布号 |
KR20090077895(A) |
申请公布日期 |
2009.07.16 |
申请号 |
KR20097006109 |
申请日期 |
2007.09.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
YANG CHIH CHAO;YANG HAINING |
分类号 |
H01L21/82 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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