| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum suction nozzle with good transfer efficiency capable of shortening time for separating a suction material from a suction surface at the transfer destination by surely holding the suction material without slip and fall when transferring the suction material by sucking the suction material by vacuum at a front end. <P>SOLUTION: In this vacuum suction nozzle, the suction surface 2 sucking the suction material by vacuum at the front end is made of ceramics and the suction surface 2 is provided with a suction hole 3. The vacuum suction nozzle has a plurality of flow passages 7 having an average depth of 0.5 to 30 μm of an air flow from an outer peripheral surface of the suction surface 2 toward the suction hole 3 on a flat surface 8 of the suction surface 2. The suction surface 2 of the vacuum suction nozzle is capable of surely holding the suction material without slip and fall, even if the suction material is small. When the suction material is separated from the suction surface 2 at the transfer destination, the flow passages 7 are provided on the suction surface 2 to make air flow. As a result, the suction material can be separated in a short time without adhering the suction material to the suction surface 2. <P>COPYRIGHT: (C)2009,JPO&INPIT |
