发明名称 DRAWING APPARATUS AND DRAWING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of drawing an ID figure without generating figure drawing data in advance. <P>SOLUTION: The drawing apparatus 100 as an embodiment of the present invention includes a generating unit 12 configured, by receiving character information which specifies a shape of an identification figure representing identification information of a sample 101, to generate pattern writing data of the identification figure on the basis of the character information; a synthesizing unit 14 configured, by receiving pattern writing data of a pattern written on the sample 101, to synthesize the pattern writing data of the pattern and the pattern writing data of the identification figure; and a pattern writing unit 150 configured to write the pattern and the identification figure on the sample 101 on the basis of the synthesized pattern writing data. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009158776(A) 申请公布日期 2009.07.16
申请号 JP20070336619 申请日期 2007.12.27
申请人 NUFLARE TECHNOLOGY INC 发明人 SUNAOSHI HITOSHI
分类号 H01L21/027;G03F1/20;G03F1/68;G03F7/20 主分类号 H01L21/027
代理机构 代理人
主权项
地址