| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measurement system easy to manufacture a grating or a pattern. <P>SOLUTION: The measurement system includes a sensor arranged to cooperate with a first pattern arranged on a structure of the measurement system to determine a first positional quantity of the sensor relative to the structure, and arranged to cooperate with a second pattern arranged on the structure to determine a second position quantity of the sensor relative to the structure, wherein the first and the second patterns are arranged on different surfaces of the structure. <P>COPYRIGHT: (C)2009,JPO&INPIT |
