| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method to manufacture a diffraction structure formation body in which the pattern by the diffraction structure and the pattern by a metal layer are in agreement without positioning. <P>SOLUTION: This manufacturing method includes a process to form a diffraction structure on part of base material surface, a process to form a metal layer 13 on the entire surface where the diffraction structure is formed, irradiate laser light onto the entire surface of the metal layer in single lines or in dot-like shape, and selectively destroy part of the metal layer 13 on the diffraction structure using absorption in the diffraction structure, a process to form a photoresist 18 on the entire surface where the diffraction structure is formed, cure the photoresist on the diffraction structure by irradiating diffraction light generated by making exposure light 19 passing through a portion where part of the metal layer is selectively destroyed, develop the photoresist and form a resist pattern covering the diffraction structure, and a process to etch the resist pattern as a mask, and remove the metal layer other than the diffraction structure. <P>COPYRIGHT: (C)2009,JPO&INPIT |
