| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor that can be manufactured easily and can suppress the influence of stress from a frame. SOLUTION: The acceleration sensor comprises: the frame 1 made of a semiconductor substrate; a weight section 2 displaced by the action of acceleration while being arranged inside the frame 1; a beam 3 for connecting the weight section 2 to the inner surface of the frame 1 in a cantilever structure; a piezo resistor 4 that is formed in the beam 3 and detects stress generated in the beam 3 by the displacement of the weight section 2 when acceleration operates on the weight section 2 as a change in the value of resistance; and an electrode 5 that is arranged in the frame 1 for taking out a signal from the piezo resistor 4. In the acceleration sensor, a beam 6 for relaxing stress made of a beam structure is formed between the frame 1 and the beam 3. COPYRIGHT: (C)2009,JPO&INPIT
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