| 摘要 |
A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.
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