| 摘要 |
<p>A substrate transfer apparatus having a variable end effecter and a multi-substrate processing system including the same are provided to process multiple substrates at high speed by enhancing flexibility in a substrate transfer process. A substrate transfer apparatus includes one or more handling arms(430) and a variable end effecter(410). The variable end effecter is mounted on the handling arm. The variable end effecter includes a plurality of substrate holders(411,412,413). The position of the substrate holder is changed between a first location and a second location. The first position corresponds to an operating position. An operation for handling a substrate is performed at the first position. A second position corresponds to a standby position. The substrate is in a standby state at the second position.</p> |
