| 摘要 |
An apparatus for calibrating an optical scanner, a method for manufacturing the apparatus, and a method for calibrating an optical scanner using the apparatus are provided to easily manufacture the optical scanner and obtain a stabilized fluorescent signal. An apparatus for calibrating an optical scanner includes a substrate onto which molecules capable of forming excimer are fixed. The apparatus includes a blank space where the excimer molecules are not fixed. The optical scanner includes at least one light source, a scanning unit, and a detector. The light source generates at least one coherent light beam at a specific wavelength. The scanning unit scans the coherent light beam on the surface of the substrate. The detector detects light generated from a sample region on the surface of the substrate.
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