DRAWING APPARATUS AND DRAWING METHOD

摘要

PROBLEM TO BE SOLVED: To form a high-accuracy pattern by increasing a drawing processing speed with a simple structure.

SOLUTION: In a DMD, six partial modulation domains D1 to D6 are defined to perform a step-and-repeat multiple exposure operation in accordance with an exposure pitch RS corresponding to the width of one partial modulation domain. In each exposure operation, an exposure-ON domain MONis defined in which micro-mirrors are controlled based on raster data (drawing data) and an exposure-OFF domain MOFFis defined in which all the micro-mirrors in the modulation domains are set in an OFF state. Light is applied to a substrate SW by means of micro-mirrors in a partial modulation domain existing in the ON domain MON. Further, a combination of partial modulation domains, which constitute the ON domain MONand the OFF domain MOFF, is updated at each exposure operation to change the ON domain MONand the OFF domain MOFFso that the ON domain MONis cyclically shifted.

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