| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a probe made of a material other than silicon with good processability in the same way as silicon. SOLUTION: A probe made of silicon is prepared and thermal oxidation treatment is applied to this probe under a steam atmosphere of 1,100°C to modified the probe to SiO<SB>2</SB>. Since the probe can be modified to SiO<SB>2</SB>while keeping the shape formed when silicon is processed, the probe made of SiO<SB>2</SB>having a sharp tip can be obtained. COPYRIGHT: (C)2009,JPO&INPIT
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