FURNACE AND RELIABILITY TEST METHOD OF THERMOCOUPLE FOR CONTROL

摘要

PROBLEM TO BE SOLVED: To provide a furnace capable of easily judging deterioration of a thermocouple for control measuring an internal temperature of a furnace body to control a heat source, with high accuracy. SOLUTION: This furnace includes: the furnace body 11 to which a heated object is charged; the heat source 12 for heating the inside of the furnace body 11; a thermocouple unit 20 provided with the thermocouple 21 for control measuring the internal temperature of the furnace body 11 and provided with a detachable thermocouple 23 for test; a temperature control portion 25 controlling the output of the heat source 12 according to a measurement value measured by the thermocouple 21 for control and adjusting the internal temperature of the furnace body 11; and an information processing terminal 29 comparing the measurement value measured by the thermocouple 21 for control with a reference measurement value measured by the thermocouple 23 for test, and determining whether the error of the thermocouple 21 for control is less than a prescribed value or not. COPYRIGHT: (C)2009,JPO&INPIT