发明名称 CHEMICAL-MECHANICAL PLANARIZATION PAD
摘要 <p>The present disclosure relates to a polishing pad including a chemical agent present in an amount sufficient to be released and dissolving into an aqueous abrasive particle polishing medium during chemical mechanical planarization and reducing abrasive particle agglomeration and a binder. The pad includes a surface such that as the pad is abraded the surface is renewed exposing at least a portion of the chemical agent.</p>
申请公布号 WO2009088945(A1) 申请公布日期 2009.07.16
申请号 WO2008US88669 申请日期 2008.12.31
申请人 INNOPAD, INC.;HSU, OSCAR, K.;LEFEVRE, PAUL;JIN, MARC, C.;ALDEBORGH, JOHN, ERIK;WELLS, DAVID, ADAM 发明人 HSU, OSCAR, K.;LEFEVRE, PAUL;JIN, MARC, C.;ALDEBORGH, JOHN, ERIK;WELLS, DAVID, ADAM
分类号 B24B37/04 主分类号 B24B37/04
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