发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device which is more highly integrated, thinned, miniaturized, more sophisticated and consumes lower power than conventional devices. <P>SOLUTION: A semiconductor element layer separated from a substrate using a peeling layer is laminated on a semiconductor element layer formed on another substrate and covered with a planarized inorganic insulation layer. After peeling off the upper part of the semiconductor element layer from the substrate, the peeling layer is removed to expose the inorganic insulation layer formed under the semiconductor element layer. The planarized inorganic insulation layer is closely contacted to an inorganic insulation film to join them. A semiconductor layer included in the semiconductor element layer is a single crystal semiconductor layer removed from a semiconductor substrate and transferred to the substrate on which the device is formed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009158939(A) 申请公布日期 2009.07.16
申请号 JP20080303618 申请日期 2008.11.28
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 TSUCHIYA KAORU
分类号 H01L21/02;H01L21/20;H01L21/265;H01L21/322;H01L21/336;H01L21/8247;H01L27/10;H01L27/115;H01L27/12;H01L29/786;H01L29/788;H01L29/792 主分类号 H01L21/02
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