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发明名称
Verfahren zur Korrektur von Abbildungsfehlern einer Messoptik einer Koordinaten-Messmaschine
摘要
申请公布号
DE102007033345(B4)
申请公布日期
2009.07.16
申请号
DE200710033345
申请日期
2007.07.16
申请人
VISTEC SEMICONDUCTOR SYSTEMS GMBH
发明人
HEIDEN, MICHAEL;RINN, KLAUS
分类号
G01B11/03;G01B11/14
主分类号
G01B11/03
代理机构
代理人
主权项
地址
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