发明名称 METHOD FOR PRODUCING LEAD ZIRCONIUM TITANATE-BASED SINTERED BODY, LEAD ZIRCONIUM TITANATE-BASED SINTERED BODY, AND LEAD ZIRCONIUM TITANATE-BASED SPUTTERING TARGET
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for producing a high-density lead zirconium titanate-based sintered body having uniform crystalline phases and containing a large amount of high-density PbO. <P>SOLUTION: The method for producing the lead zirconium titanate-based sintered body comprises: producing a pre-sintered body by sintering raw material powder of lead zirconium titanate mixed in a stoichiometric composition at a temperature of 900&deg;C or higher and 1,200&deg;C or lower; pulverizing the pre-sintered body; producing lead-excessive mixed powder by adding PbO powder to the powder obtained by pulverizing the pre-sintered body; and sintering the lead-excessive mixed powder at a temperature lower than the sintering temperature of the pre-sintered body. By separating the sintering process into two stages, a high-density (e.g. &ge;95%) PZT sintered body constituted only of the PZT having the stoichiometric composition in which PbZrO<SB>3</SB>, PbTiO<SB>3</SB>, ZrO<SB>2</SB>, TiO<SB>2</SB>, PbO, and other intermediate compounds are absent, and the excessive PbO can be obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009155171(A) 申请公布日期 2009.07.16
申请号 JP20070336437 申请日期 2007.12.27
申请人 ULVAC MATERIAL KK 发明人 HASHIGUCHI SHOICHI;KIN YUTAKA;MITSUGASHIMA TAKANORI
分类号 C04B35/49;C04B35/491;C23C14/34;H01L41/187;H01L41/333;H01L41/39;H01L41/43 主分类号 C04B35/49
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