| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a C/C composite which is formed by continuously performing CVI and CVD to impregnate and coat pyrolytic carbon, and can exhibit excellent SiC resistance, and to provide a component for a single crystal pulling apparatus. <P>SOLUTION: A pitch or a resin is beforehand impregnated into a C/C composite base material for densification, thereafter, it is continuously subjected to CVI and CVD treatment in the same furnace and in the same process, thus the density difference between a coated pyrolytic carbon layer and an impregnated pyrolytic carbon layer and the average surface roughness of the coated layer are controlled, and both the layers are continuously formed, so as to secure its SiC resistance. <P>COPYRIGHT: (C)2009,JPO&INPIT |
