| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device of a wafer with such a function to detect the fact that plural struts constituting support means for supporting a suction maintenance pad to a conveyance arm are uncoupled from the suction maintenance pad. SOLUTION: The carrying device of the wafer includes plural struts and coil springs. The struts include: a suction maintenance pad with an absorption side which carries out suction and maintenance of the wafer on a lower surface; the conveyance arm supporting the suction maintenance pad in an end; and the support means for supporting the suction maintenance pad in an end of the conveyance arm in a suspension state, in which the support means includes a latch in an upper limit portion and is distributed and arranged by respectively carrying out threading in plural threading holes provided in one end of the conveyance arm and a lower limit is bonded to a top face of the suction maintenance pad. The coil springs are loosely fitted to the plural struts respectively and are biased in the direction of separating the suction maintenance pad from the conveyance arm, wherein there is provided strut secession detection means for detecting the fact that the plural struts of the support means are uncoupled from the suction maintenance pad. COPYRIGHT: (C)2009,JPO&INPIT
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